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Laser micro machining is a relatively new effective approach to the non contact manufacturing of miniaturized parts. Laser micro machining can be used not only for shaping hard and brittle materials, as diamond, silicon, various metals and ceramics, but it makes possible permissible machining of plastic materials. This distinctive advantage of laser micromachining caused by the overcoming the main difficulty of machining soft materials using the mechanical approach, which is the plastic flow. Plastic flow deformation leads to poor quality of a produced part due to adherence of metal to a tool. Moreover, laser micromachining can deals with geometrically complex delicate work pieces, thanks to no large force exerted. Finally, this approach is cost effective and allows machining at sub micron depths.
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